International Journal For Multidisciplinary Research

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A Comprehensive Review of MEMS-enabled Dual-mode Pressure and Temperature Sensors

Author(s) Sivatmiga T N, Dhivyabharathi N, Vijayalakshmi R
Country India
Abstract This paper offers an examination of MEMS-enabled dual-mode sensors, emphasizing key concepts, technologies, and developments in the area. Micro-Electro-Mechanical Systems, or MEMS, have revolutionized sensor design, enabling the creation of small, effective, and multipurpose devices for simultaneous monitoring of temperature and pressure. The review begins with how MEMS and Integrated Circuits (ICs) are integrated into sensor systems and explores MEMS incorporation into dual-mode sensors, clarifying crucial manufacturing processes and design approaches. Furthermore, the paper classifies and examines basic MEMS sensor types, such as Surface Acoustic Wave (SAW), Barometers, Differential Pressure Sensors, Absolute Pressure Sensors, Strain Gauge Pressure Sensors, Accelerometer-Based Pressure Sensors, Magnetometer-Based Pressure Sensors, Fiber Bragg Grating (FBG) Temperature Sensors, and Force Sensors.
Keywords Dual-mode sensors, Micro-Electro-Mechanical Systems (MEMS), Integrated Circuits (ICs), Surface Acoustic Wave (SAW) sensors, Barometers, Differential Pressure sensors, Absolute Pressure sensors, Strain Gauge sensors, Accelerometer-Based sensors, Magnetometer-Based sensors, Fiber Bragg Grating (FBG) Sensors, Force sensors.
Field Engineering
Published In Volume 6, Issue 2, March-April 2024
Published On 2024-04-20
Cite This A Comprehensive Review of MEMS-enabled Dual-mode Pressure and Temperature Sensors - Sivatmiga T N, Dhivyabharathi N, Vijayalakshmi R - IJFMR Volume 6, Issue 2, March-April 2024. DOI 10.36948/ijfmr.2024.v06i02.16572
DOI https://doi.org/10.36948/ijfmr.2024.v06i02.16572
Short DOI https://doi.org/gtrsxv
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